Samynathan M, Mohamed Ali RA. Aluminium Nitride Thin Film Deposition Using Magnetron Sputtering on Silicon and Microscopic Glass Substrate for IDE Applications. EEEE [Internet]. 2024 Apr. 21 [cited 2026 Aug. 15];5(1):230-5. Available from: https://periodical.uthm.edu.my/index.php/eeee/article/view/15310